Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/11/1998
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Application #:
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08533933
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Filing Dt:
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09/26/1995
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Inventor:
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KENJI NISHI
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Title:
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EXPOSURE APPARATUS WHEREIN A WAFER CONTACT PORTION OF A MOVABLE STAGE INCLUDES LINEAR RIDGES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO 100, JAPAN |
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| SHAPIRO AND SHAPIRO |
| NELSON H. SHAPIRO |
| 1100 WILSON BLVD., STE. 1701 |
| ARLINGTON, VA 22209 |
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