Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/18/1998
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Application #:
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08309745
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Filing Dt:
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09/21/1994
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Inventor:
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KAZUAKI SUZUKI
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Title:
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SCANNING PROJECTION EXPOSURE METHOD AND APPARATUS USING SUBSTRATE POSITION ADJUSTMENT BASED ON MASK PATTERN POSITION DURING SCANNING EXPOSURE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100, JAPAN |
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| SHAPIRO AND SHAPIRO |
| NELSON H. SHAPIRO |
| 1100 WILSON BOULEVARD, STE. 1701 |
| ARLINGTON, VA 22209 |
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