Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/25/1998
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Application #:
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08713719
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Filing Dt:
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09/13/1996
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Inventors:
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TETSUO TANIGUCHI, TOSHIHIKO TSUJI, TADASHI NAGAYAMA
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Title:
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PROJECTION EXPOSURE APPARATUS HAVING FUNCTION OF DETECTING INTENSITY DISTRIBUTION OF SPATIAL IMAGE, AND METHOD OF DETECTING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CHIYODA-KU |
| 2-3, MARUNOUCHI 3-CHOME |
| TOKYO 100, JAPAN |
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| FOLEY & LARDNER |
| DAVID A. BLUMMENTHAL |
| 3000 K STREET, N.W., STE. 500 |
| WASHINGTON, D.C. 20007-5109 |
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