Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/06/1998
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Application #:
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08654885
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Filing Dt:
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05/29/1996
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Inventors:
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KATSUHISA MITA, YASUO MATSUOKA, KENICHI TANIYAMA, MICHIROU TAKANO, TSUNEO AKASAKI et al
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Title:
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APPARATUS FOR BAKING PHOTORESIST APPLIED ON SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 72 HORIKAWA-CHO, SAIWAI-KU |
| KAWASAKI-SHI, JAPAN |
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| FINNEGAN, HENDERSON, FARABOW, ET AL. |
| ERNEST F. CHAPMAN |
| 1300 I STREET, N.W. |
| WASHINGTON, D.C. 20005 |
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