Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/06/1998
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Application #:
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08567376
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Filing Dt:
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12/04/1995
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Inventors:
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YAN YE, HIROJI HANAWA, DIANA X. MA, GERALD Z. YIN, PETER LOEWENHARDT, DONALD OLGADO et al
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Title:
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RF PLASMA REACTOR WITH CLEANING ELECTRODE FOR CLEANING DURING PROCESSING OF SEMICONDUCTOR WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95051 |
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| APPLIED MATERIALS, INC. |
| PETER J. SGARBOSSA |
| 3050 BOWERS AVE. |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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