Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/06/1998
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Application #:
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08810389
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Filing Dt:
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03/03/1997
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Inventors:
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SYUN-MING JANG, YING-HO CHEN, YU CHEN-HUA
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Title:
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TRENCH FILLING METHOD EMPLOYING OXYGEN DENSIFIED GAP FILLING TEOS/OZONE SACUD SILICON OXIDE LAYER FORMED WITH LOW OZONE CONCENTRATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| 121, PARK AVE. 3 |
| HSIN-CHU, TAIWAN R.O.C |
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| GEORGE O. SAILE |
| 20 MCINTOSH DRIVE |
| POUGHKEEPSIE, NEW YORK 12603 |
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