Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/20/1998
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Application #:
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08727695
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Filing Dt:
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10/07/1996
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Inventor:
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KYOICHI SUWA
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Title:
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FOCUSING AND TILTING ADJUSTMENT SYSTEM FOR LITHOGRAPHY ALIGNER, MANUFACTURING APPARATUS OR INSPECTION APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1399 SHOREWAY ROAD |
| BELMONT, CALIFORNIA 94002 |
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| SKJERVEN, MORRILL, MACPHERSON, ET AL. |
| NORMAN R. KLIVANS, ESQ. |
| 25 METRO DRIVE, SUITE 700 |
| SAN JOSE, CA 95110 |
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