Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/20/1998
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Application #:
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08639843
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Filing Dt:
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05/08/1996
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Inventor:
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VINCENT E. BURKHART
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Title:
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INSULATED WAFER SPACING MASK FOR A SUBSTRATE SUPPORT CHUCK AND METHOD OF FABRICATING SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PATENT COUNSEL |
| 3050 BOWERS AVENUE, PO BOX 450A |
| SANTA CLARA, CALIFORNIA 95051 |
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| APPLIED MATERIALS, INC./RAYMOND R. MOSER |
| PATENT COUNSEL |
| 3050 BOWERS AVE. |
| PO BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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