Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/27/1998
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Application #:
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08657069
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Filing Dt:
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06/03/1996
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Inventor:
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TSU SHIH
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Title:
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MULTIPLE ETCH METHOD FOR OPTIMIZING INTER-METAL DIELECTRIC (IMD) SPACER LAYER PROFILE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 121, PARK AVE. 3 SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN R.O.C |
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| GEORGE O. SAILE |
| 20 MCINTOSH DR. |
| POUGHKEEPSIE, NY 12603 |
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