Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/03/1998
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Application #:
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08818724
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Filing Dt:
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03/14/1997
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Inventors:
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YOSHIHIDE SATO, TAKAYUKI KOMIYA, HIROKI OHNO
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Title:
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WASHING LIQUID FOR POST-POLISHING AND POLISHING-CLEANING METHOD IN SEMICONDUCTOR PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MINATO-KU |
| 3-6 AKASAKA 5-CHOME |
| TOKYO 107, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND ET AL. |
| NORMAN F. OBLON |
| FOURTH FLOOR |
| 1755 JEFFERSON DAVIS HIGHWAY |
| ARLINGTON, VA 22202 |
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