Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/10/1998
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Application #:
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08738287
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Filing Dt:
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10/25/1996
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Inventors:
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HIDEKI YABE, KENJI MARUMOTO, SUNAO AYA, KOJI KISE, HIROAKI SUMITANI, TAKASHI HIFUMI et al
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Title:
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METHOD OF MANUFACTURING X-RAY MASK AND HEATING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO 100, JAPAN |
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| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| MICHAEL K. MUTTER |
| P.O. BOX 747 |
| FALLS CHURCH, VIRGINIA 22040-0747 |
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