Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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11/10/1998
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Application #:
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08818375
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Filing Dt:
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03/14/1997
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Inventors:
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ILYA GRODNENSKY, ETSUYA MORITA, KYOICHI SUWA, SHIGERU HIRUKAWA
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Title:
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METHOD AND APPARATUS FOR DETERMINING PERFORMANCE CHARACTERISTICS IN LITHOGRAPHIC TOOLS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1399 SHOREWAY ROAD |
| BELMONT, CALIFORNIA 94002 |
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| NIKON RESEARCH CORPORATION OF AMERICA |
| JOSEPH T. FITZGERALD, ESQ. |
| 1399 SHOREWAY ROAD |
| BELMONT, CA 94002 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-3, NISHI-OHI, 1 CHOME, SHINAGAWA-KU |
| TOKYO, JAPAN |
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| FINNEGAN, HENDERSON, FARABOW, GARRETT |
| JEMY SOEGENG |
| 1300 I STREET, N.W. |
| WASHINGTON, D.C. 20005-3315 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1399 SHOREWAY ROAD |
| BELMONT, CALIFORNIA 94002 |
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| FINNEGAN, HENDERSON, FARABOW, ET AL. |
| JEMY SOEGENG |
| 1300 I STREET, N.W. |
| WASHINGTON, D.C. 20005-3315 |
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