Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/24/1998
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Application #:
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08160704
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Filing Dt:
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12/01/1993
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Inventors:
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SAMUEL M. MYERS JR., DAWN M. BISHOP, DAVID M. FOLLSTAEDT
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Title:
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IMPURITY GETTERING IN SILICON USING CAVITIES FORMED BY HELIUM IMPLANTATION AND ANNEALING
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Assignment:
1
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| 1000 INDEPENDENCE AVENUE, S.W. |
| GC-62, MS 6F-067 (FORSTL) |
| WASHINGTON,, DISTRICT OF COLUMBIA 20585 |
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| ROBERT M. POTEAT, ACTING ASSISTANT |
| U.S. DEPT. OF ENERGY |
| GC-62, MS 6F-067 (FORSTL) |
| 1000 INDEPENDENCE AVENUE, S.W. |
| WASHINGTON, D.C. 20585 |
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