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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
5843236
Issue Dt:
12/01/1998
Application #:
08529282
Filing Dt:
09/15/1995
Inventors:
HIROYUKI YOSHIKI, KAZUKI KONDO, AKIRA ISHII, SHIGEKI AMADATSU, TATSUYA SAIJO et al
Title:
PLASMA PROCESSING APPARATUS FOR RADIATING MICROWAVE FROM RECTANGULAR WAVEGUIDE THROUGH LONG SLOT TO PLASMA CHAMBER
Assignment: 1
Reel/Frame:
007667/0740Recorded: 09/15/1995Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
YOSHIKI, HIROYUKI
Exec Dt:
08/31/1995
KONDO, KAZUKI
Exec Dt:
08/31/1995
ISHII, AKIRA
Exec Dt:
08/31/1995
AMADATSU, SHIGEKI
Exec Dt:
08/31/1995
SAIJO, TATSUYA
Exec Dt:
08/31/1995
ITADANI, KOJI
Exec Dt:
08/31/1995
AOYAMA, TAKAHIRO
Exec Dt:
08/31/1995
Assignee:
DAIHEN CORPORATION
1-11, TAGAWA 2-CHOME YODOGAWA-KU, OSAAK-SHI
OSAKA, JAPAN 532
Correspondent:
LEOPOLD PRESSER, ESQ.
SCULLY, SCOTT, MURPHY & PRESSER
400 GARDEN CITY PLAZA
GARDEN CITY, NY 11530

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