Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/29/1998
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Application #:
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08680960
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Filing Dt:
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07/16/1996
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Inventors:
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YOSHIHISA OOAEH, AKIO YAMADA, HIROSHI YASUDA
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Title:
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CHARGED-PARTICLE-BEAM EXPOSURE DEVICE AND CHARGED-PARTICLE-BEAM EXPOSURE METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NAKAHARA-KU, KAWASAKI-SHI |
| 1-1, KAMIKODANAKA 4-CHOME |
| KANAGAWA 211, JAPAN |
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| STAAS & HALSEY |
| ATTENTION: H. J. STAAS |
| 700 ELEVENTH STREET, N.W. |
| SUITE 500 |
| WASHINGTON, D.C. 20001 |
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