Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/05/1999
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Application #:
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08326506
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Filing Dt:
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10/20/1994
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Inventors:
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DALE DUBOIS, ALAN F. MORRISON, RICHARD A. MARSH, MEI CHANG
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Title:
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SUBSTRATE SUPPORT SHIELD IN WAFER PROCESSING REACTORS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT |
| 3050 BOWERS AVENUE, M/S #0934 |
| SANTA CLARA, CALIFORNIA 95054 |
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| CHARLES S. GUENZER |
| APPLIED MATERIALS, INC. |
| LEGAL AFFAIRS DEPT. |
| 3050 BOWERS AVE. M/S 2634 |
| SANTA CLARA, CA 95054 |
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