Patent Assignment Abstract of Title
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For pending or abandoned applications please consult USPTO staff.
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/02/1999
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Application #:
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08753645
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Filing Dt:
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11/27/1996
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Inventors:
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HENRY GUCKEL, HARALD EMMERICH, JONATHAN L. KLEIN
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Title:
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ALIGNMENT METHOD FOR MULTI-LEVEL DEEP X-RAY LITHOGRAPHY UTILIZING ALIGNMENT HOLES AND POSTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 614 WALNUT STREET |
| MADISON, WISCONSIN 53705 |
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| WISCONSIN ALUMNI RESEARCH FOUNDATION |
| LESLIE RECTOR |
| 614 WALNUT STREET |
| MADISON, WI 53705 |
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Assignment:
2
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| 800 NORTH QUINCY STREET |
| CHIEF OF NAVAL RESEARCH, ONR OOCC |
| ARLINGTON, VIRGINIA 22217 |
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| JEAN TRUMAN |
| CHIEF OF NAVAL RESEARCH |
| OFFICE OF COUNSEL |
| 800 NORTH QUINCY STREET |
| ARLINGTON VA 22217-5660 |
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| FRANK G. NIEMAN |
| OFFICE OF NAVAL RESEARCH |
| OFFICE OF COUNSEL |
| 800 NORTH QUINCY STREET |
| ARLINGTON, VA 22217-5660 |
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