Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/02/1999
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Application #:
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08833413
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Filing Dt:
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04/04/1997
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Inventors:
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GUANG-JYE SHIAU, PAUL HERZ, XIAN-CAN DENG, XIAOBING DIANA MA
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Title:
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METHOD FOR ANISOTROPICALLY ETCHING TUNGSTEN USING SF6, CHF 3, AND N2
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT |
| 3050 BOWERS AVENUE, MAIL STOP 2061 |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ASHOK K. JANAH |
| PATENT COUNSEL LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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