Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/02/1999
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Application #:
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08574838
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Filing Dt:
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12/19/1995
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Inventors:
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TETSUYA ISHIKAWA, BRIAN LUE
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Title:
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IN-SITU SUBSTRATE TEMPERATURE MEASUREMENT SCHEME IN PLASMA REACTOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PATENT COUNSEL |
| 3050 BOWERS AVENUE, P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95051 |
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| APPLIED MATERIALS, INC. |
| MICHAEL B. EINSCHLAG, PATENT COUNSEL |
| 3035 BOWERS AVE., P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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