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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	5878191	Issue Dt:	03/02/1999	Application #:	08451509	Filing Dt:	05/26/1995
Inventors:	NAOTO MIYASHITA, ICHIRO KATAKABE, HIROSHI KAWAMOTO, KENJI DOI, TSUYOSHI OKUDA
Title:	HEAT TREATMENT APPARATUS FOR SEMICONDUCTOR WAFERS

Assignment: 1

Reel/Frame:

Recorded: 09/28/1995

Pages: 4

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

Exec Dt:

09/19/1995

Exec Dt:

09/19/1995

Exec Dt:

09/19/1995

Exec Dt:

09/19/1995

Exec Dt:

09/19/1995

Assignee:

72 HORIKAWA-CHO, SAIWAI-KU

KAWASAKI-SHI, JAPAN

Correspondent:

ERNEST F. CHAPMAN

FINNEGAN, HENDERSON, FARABOW,

GARRETT & DUNNERM L.L.P.

1300 I STREET, N.W.

WASHINGTON, D.C. 20005

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