Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/09/1999
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Application #:
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08852291
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Filing Dt:
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05/07/1997
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Inventors:
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KENYA WADA, KAZUHIKO GONMORI, HISAYOSHI ICHIKAWA, NOBUO MORITA, HIROSHI FUKUDA
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Title:
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METHOD AND APPARATUS FOR PROCESSING SUBSTRATES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 16-3, HIGASHI 3-CHOME, SHIBUYA-KU |
| TOKYO, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & |
| NEUSTADT, P.C. |
| ROBERT F. GNUSE |
| 1755 JEFFERSON DAVIS HWY., 4TH FLOOR |
| ARLINGTON, VA 22202 |
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