Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/16/1999
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Application #:
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08695024
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Filing Dt:
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08/09/1996
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Inventor:
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MASAAKI KURIHARA
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Title:
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PRODUCTION METHOD OF A PHASE SHIFT PHOTOMASK HAVING A PHASE SHIFT LAYER COMPRISING SOG
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, ICHIGAYA-KAGACHO 1-CHOME, SHINJUKU-KU, |
| TOKYO 162, JAPAN |
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| SUGHRUE, MION, ZINN, MACPEAK & SEAS |
| 2100 PENNSYLVANIA AVENUE, NW STE 800 |
| WASHINGTON, DC 20037-3202 |
| ATTN: DARRYL MEXIC |
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