Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/16/1999
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Application #:
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08963520
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Filing Dt:
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11/03/1997
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Inventors:
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TIMOTHY K. MINTON, KONSTANTINOS P. GIAPIS
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Title:
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SEMICONDUCTOR ETCHING BY HYPERTHERMAL NEUTRAL BEAMS
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Assignment:
1
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| 300 "E" STREET, SW., CODE GP |
| WASHINGTON, DISTRICT OF COLUMBIA 20546 |
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| NATIONAL AERONAUTICS AND SPACE ADMIN |
| KATHY BAYER |
| 300 "E" STREET SW, CODE GP |
| WASHINGTON, DC 20546 |
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