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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/23/1999
Application #:
08820461
Filing Dt:
03/17/1997
Inventors:
PAU-LO HSU, LI-CHENG SHEN, CHI-SHIEN YANG, CHI-SHUN HOU
Title:
AUTOMATIC SUPERVISION SYSTEM ON THE ION BEAM MAP FOR ION IMPLANTATION PROCESS
Assignment: 1
Reel/Frame:
008588/0176Recorded: 03/17/1997Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/27/1997
Exec Dt:
02/27/1997
Exec Dt:
02/27/1997
Exec Dt:
02/27/1997
Assignee:
SCIENCE-BASED INDUSTRIAL PARK
NO. 9, CREATION RD. 1,
HSINCHU, TAIWAN R.O.C
Correspondent:
CHRISTENSEN O'CONNOR JOHNSON ET AL
LAWRENCE E. LYCKE, ESQ.
1420 FIFTH AVENUE, SUITE 2800
SEATTLE, WA 98101-2347

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