Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/06/1999
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Application #:
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08720868
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Filing Dt:
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10/03/1996
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Inventors:
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RYOKI TOBE, MASAO SASAKI, ATSUSHI SEKIGUCHI, KEN-ICHI TAKAGI
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Title:
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PLASMA ENHANCED CVD APPARATUS AND PROCESS, AND DRY ETCHING APPARATUS AND PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8-1 YOTSUYA 5-CHOME FUCHU-SHI |
| TOKYO 183, JAPAN |
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| BURNS, DOANE, SWECKER, MATHIS, L.L.P. |
| PLATON H. MANDROS |
| POST OFFICE BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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