Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/06/1999
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Application #:
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08666981
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Filing Dt:
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06/20/1996
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Inventors:
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HONG CHING SHAN, EVANS Y. LEE, MICHAEL D. WELCH, ROBERT W. WU, BRYAN PU, PAUL E. LUSCHER et al
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Title:
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ADJUSTING DC BIAS VOLTAGE IN PLASMA CHAMBERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPART. |
| 3050 BOWERS AVENUE MS2061 |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| JAMES C. WILSON |
| PATENT COUNSEL |
| LEGAL AFFAIRS DEPT., P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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