Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/06/1999
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Application #:
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08855736
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Filing Dt:
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05/09/1997
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Inventor:
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MAMORU NAKASUJI
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Title:
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APPARATUS AND METHODS FOR INSPECTING WAFERS AND MASKS USING MULTIPLE CHARGED-PARTICLE BEAMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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FUJI BUILDING, 2-3, MARUNOUCHI 3-CHOME |
CHIYODA-KU, TOKYO 100, JAPAN |
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KLARQUIST SPARKMAN CAMPBELL ET AL. |
DONALD L. STEPHENS, JR. |
ONE WORLD TRADE CENTER, SUITE 1600 |
121 S.W. SALMON STREET |
PORTLAND, OREGON 97204-2988 |
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