Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/20/1999
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Application #:
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08602350
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Filing Dt:
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02/16/1996
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Inventors:
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HIROSHI YASUDA, AKIO YAMADA, KAZUSHI ISHIDA, TOHRU IKEDA, KOUZI TAKAHATA
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Title:
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CHARGED PARTICLE BEAM EXPOSURE METHOD AND APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, KAMIKODANAKA 4-CHOME, NAKAHARA-KU |
| KAWASAKI-SHI, KANAGAWA 211, JAPAN |
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| H.J. STAAS |
| STAAS & HALSEY |
| ATTN: H.J. STAAS |
| 700 ELEVENTH STREET, N.W., SUITE 500 |
| WASHINGTON, D.C., 20001 |
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