Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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04/27/1999
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Application #:
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08683053
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Filing Dt:
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07/16/1996
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Inventors:
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HIROJI HANAWA, PETER K. LOEWENHARDT, TIMOTHY D. DRISCOLL, GERALD Z. YIN
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Title:
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PLASMA UNIFORMITY CONTROL FOR AN INDUCTIVE PLASMA SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| PATENT COUNSEL |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95052 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PATENT COUNSEL |
| 3050 BOWERS AVENUE, P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95051 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| P.O. BOX 450A |
| 3050 BOWERS AVE. |
| SANTA CLARA, CA 95052 |
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