Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/25/1999
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Application #:
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08580886
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Filing Dt:
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12/29/1995
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Inventor:
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AKIKAZU TANIMOTO
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Title:
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ALIGNMENT METHOD AND EXPOSURE APPARATUS FOR USE IN SUCH ALIGNMENT METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME CHIYODA-KU |
| TOKYO, JAPAN |
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| ARMSTRONG, WESTERMAN, HATTORI ET AL |
| WILLIAM F. WESTERMAN |
| 1725 K. STREET, N. W. |
| SUITE 1000 |
| WASHINGTON, D.C. 20006 |
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