Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/22/1999
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Application #:
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09028171
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Filing Dt:
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02/23/1998
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Inventors:
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KENJI MORITA, TERUAKI OKINO
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Title:
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CHARGED-PARTICLE-BEAM EXPOSURE APPARATUS AND METHODS WITH SUBSTRATE- TEMPERATURE CONTROL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| FUJI BUILDING, 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO 100, JAPAN |
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| KLARQUIST SPARKMAN CAMPBELL ET AL. |
| DONALD L. STEPHENS, JR. |
| ONE WORLD TRADE CENTER, SUITE 1600 |
| 121 S.W. SALMON STREET |
| PORTLAND, OR 97204-2988 |
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