Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/13/1999
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Application #:
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08428036
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Filing Dt:
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04/25/1995
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Inventors:
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MICHAEL W. CRESSWELL, LOREN W. LINHOLM, RICHARD A. ALLEN
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Title:
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OVERLAY TARGET AND MEASUREMENT PROCEDURE TO ENABLE SELF-CORRECTION FOR WAFER-INDUCED TOOL-INDUCED SHIFT BY IMAGING SENSOR MEANS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14TH AND CONSTITUTION |
| WASHINGTON, DISTRICT OF COLUMBIA 20230 |
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| NATIONAL INSTITUTE OF STANDARDS AND |
| TECHNOLOGY |
| MARCIA SALKELD |
| BUILDING 221, ROOM B-256 |
| GAITHERSBURG, MD 20899 |
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