Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/20/1999
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Application #:
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08835327
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Filing Dt:
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04/07/1997
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Inventors:
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S.M. JANG, C.H. YU
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Title:
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PLANARIZATION OF SHALLOW TRENCH ISOLATION BY DIFFERENTIAL ETCHBACK AND CHEMICAL MECHANICAL POLISHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 9, CREATION RD. |
| HSINCHU, TAIWAN R.O.C |
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| LADAS & PARRY |
| RICHARD P. BERG |
| 5670 WILSHIRE BLVD. |
| #2100 |
| LOS ANGELES, CA 90036 |
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