Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/27/1999
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Application #:
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08694353
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Filing Dt:
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08/08/1996
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Inventor:
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KENNETH A. AITCHISON
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Title:
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METHOD AND APPARATUS FOR TREATING EXHAUST GASES FROM CVD, PECVD OR PLASMA ETCH REACTORS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3970 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| SKJERVEN, MORRILL, MACPHERSON ET AL. |
| DAVID E. STEUBER |
| 25 METRO DRIVE, SUITE 700 |
| SAN JOSE, CALIFORNIA 95110 |
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