Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/27/1999
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Application #:
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08662754
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Filing Dt:
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06/10/1996
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Inventors:
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CARL J. RADENS, CYNTHIA A. FAIRCHOK
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Title:
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SELECTIVE OXIDE-TO-NITRIDE ETCH PROCESS USING C4F8/CO/AR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OLD ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| IBM CORPORATION |
| ALISON D. MORTINGTER |
| INTELLECTUAL PROPERTY LAW DEPT. |
| DEPT. 18G/BLDG. 300-482, 1580 ROUTE 52 |
| HOPEWELL JUNCTION, NY 12533-6531 |
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