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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/03/1999
Application #:
08807902
Filing Dt:
02/27/1997
Inventor:
HIDEAKI SAKAMOTO
Title:
METHOD OF ISOLATING VIBRATION IN EXPOSURE APPARATUS
Assignment: 1
Reel/Frame:
008421/0423Recorded: 02/27/1997Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
02/26/1997
Assignee:
2-3, MARUNOUCHI 3-CHOME
FUJI BUILDING
CHIYODA-KU, TOKYO 100, JAPAN
Correspondent:
MORGAN, LEWIS & BOCKIUS LLP
MR. ROBERT J. GAYBRICK
1800 M STREET, N.W.
WASHINGTON, D.C. 20036

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