Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/03/1999
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Application #:
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08993593
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Filing Dt:
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12/18/1997
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Inventors:
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MAMORU NAKASUJI, TERUAKI OKINO
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Title:
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ELECTRON-BEAM PROJECTION-MICROLITHOGRAPHY APPARATUS AND METHODS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CHIYODA-KU |
| FUJI BUILDING, 2-3, MARUNOUCHI 3-CHOME |
| TOKYO 100, JAPAN |
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| KLARQUIST, SPARKMAN, CAMPBELL, ET AL. |
| DONALD L. STEPHENS, JR. |
| ONE WORLD CENTER |
| 121 S.W. SALMON STREET, SUITE 1600 |
| PORTLAND, OR 97204-2988 |
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