Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/03/1999
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Application #:
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08883068
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Filing Dt:
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06/27/1997
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Inventors:
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ALBERT M. LAMBSON, RICK CAPLE, ERIC H. LENZ, LAURA M. BRAUN, RICKY MARSH
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Title:
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METHOD AND AN APPARATUS FOR OFFSETTING PLASMA BIAS VOLTAGE IN BI-POLAR ELECTRO-STATIC CHUCKS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| HICKMAN BEYER & WEAVER |
| JOSEPH A. NGUYEN |
| P.O. BOX 61059 |
| PALO ALTO, CA 94306 |
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