Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/10/1999
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Application #:
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09052997
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Filing Dt:
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03/31/1998
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Inventor:
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MARK A. KENNARD
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Title:
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TECHNIQUES FOR FORMING TRENCHES IN A SILICON LAYER OF A SUBSTRATE IN A HIGH DENSITY PLASMA PROCESSING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BEYER & WEAVER, LLP |
| JOSEPH A. NGUYEN |
| P.O. BOX 61059 |
| PALO ALTO, CA 94306 |
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