Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/10/1999
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Application #:
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08753090
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Filing Dt:
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11/20/1996
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Inventors:
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SEIJI SAMUKAWA, TSUTOMU TSUKADA, YUKITO NAKAGAWA, KIBATSU SHINOHARA, HIROFUMI MATSUMOTO et al
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Title:
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PLASMA PROCESSING APPARATUS FOR PRODUCING PLASMA AT LOW ELECTRON TEMPERATURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7-1, SHIBA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN |
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| 1119, NAKAYAMA-CHO, MIDORI-KU |
| YOKOHAMA-SHI, KANAGAWA, JAPAN |
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| 8-1, YOTSUYA 5-CHOME |
| FUCHU-SHI, TOKYO, JAPAN |
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| SUGHRUE, MION, ZINN, MACPEAK & SEAS |
| J. FRANK OSHA |
| 2100 PENNSYLVANIA AVENUE, N.W. |
| SUITE 800 |
| WASHINGTON, D.C. 20037-3202 |
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