Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/17/1999
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Application #:
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08649558
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Filing Dt:
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05/17/1996
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Inventor:
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BAUSAN YUAN
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Title:
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STAGE CONTROL METHOD AND APPARATUS WITH VARYING STAGE CONTROLLER PARAMETER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3 MARUNOUCHI, 3-CHOME, CHIYODA-KU |
| TOKYO 100, JAPAN |
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| SKJERVEN, MORRILL, MACPHERSON, ET AL |
| NORMAN R. KLIVANS |
| 25 METRO DRIVE SUITE 700 |
| SAN JOSE, CA., 95110 |
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