Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/31/1999
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Application #:
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08993021
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Filing Dt:
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12/18/1997
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Inventors:
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HIROSHI HASHIMOTO, KIYOHISA TATEYAMA, KIYOMITSU YAMAGUCHI, YOSHITAKA MATSUDA et al
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Title:
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APPARATUS AND METHOD FOR SUPPLYING PROCESS SOLUTION TO SURFACE OF SUBSTRATE TO BE PROCESSED
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MINATO-KU |
| 3-6 AKASAKA 5-CHOME |
| TOKYO 107, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND ET AL. |
| C. IRVIN MCCLELLAND |
| FOURTH FLOOR |
| 1755 JEFFERSON DAVIS HIGHWAY |
| ARLINGTON, VA 22202 |
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