Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/07/1999
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Application #:
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08695023
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Filing Dt:
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08/09/1996
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Inventor:
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TAKAHIRO TAMURA
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Title:
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ELECTROSTATIC CHUCKING MECHANISM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8-1, YOTSUYA 5-CHOME, FUCHU-SHI |
| TOKYO, JAPAN |
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| SUGHRUE, MION, ZINN, MACPEAK & SEAS |
| DARRYL MEXIC |
| SUITE 800 |
| 2100 PENNSYLVANIA AVENUE, N.W. |
| WASHINGTON, DC 20037-3202 |
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