Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/14/1999
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Application #:
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08837468
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Filing Dt:
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04/18/1997
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Inventors:
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KAZUO SAITO, YASUSHI MOCHIZUKI, AKIRA YAMAGUCHI
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Title:
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ELECTRODE FOR PLASMA ETCHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 31-11, NIHONBASHI NINGYOCHO 2-CHOME, CHUO-KU |
| TOKYO, JAPAN |
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| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| RAYMOND C. STEWART |
| P.O. BOX 747 |
| FALLS CHURCH, VA 22040-0747 |
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