Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/14/1999
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Application #:
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08601780
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Filing Dt:
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02/15/1996
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Inventors:
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SUSAN C. ABRAHAM, PETER H. CHEN, JERRY YANG
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Title:
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METHODS FOR REDUCING ETCH RATE LOADING WHILE ETCHING THROUGH A TITANIUM NITRIDE ANTI-REFLECTIVE LAYER AND AN ALUMINUM-BASED METALLIZATION LAYER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| HICKMAN BEYER & WEAVER |
| JOSEPH A. NGUYEN |
| P.O. BOX 61059 |
| PALO ALTO, CA 94306 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| HICKMAN BEYER & WEAVER |
| JOSEPH A. NGUYEN |
| P.O. BOX 61059 |
| PALO ALTO, CALIFORNIA 94306 |
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