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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
09/14/1999
Application #:
08892865
Filing Dt:
07/14/1997
Inventors:
YUJI MAEDA, KATSUMI MITANI, MANABU YAMAZAKI, NAOMI YOSHIDA, KEIICHI TANAKA
Title:
SUPPRESSION OF TUNGSTEN FILM DEPOSITION ON A SEMICONDUCTOR WAFER BEVEL EDGE WITH A HALOGENIDE PURGE GAS
Assignment: 1
Reel/Frame:
009128/0193Recorded: 01/09/1998Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/16/1997
Exec Dt:
08/07/1997
Exec Dt:
08/27/1997
Exec Dt:
08/29/1997
Exec Dt:
09/16/1997
Assignee:
P.O. BOX 450A, M/S #2061
LEGAL AFFAIRS DEPARTMENT
SANTA CLARA, CALIFORNIA 95054
Correspondent:
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY
LEGAL AFFAIRS DEPT. - M/S 2061
P.O. BOX 450A
SANTA CLARA, CA 95052

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