Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/21/1999
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Application #:
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09008596
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Filing Dt:
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01/16/1998
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Inventor:
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OSAMU TANITSU
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Title:
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ILLUMINATION OPTICAL SYSTEM AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| FUJI BUILDING, 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO 100, JAPAN |
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| MORGAN, LEWIS & BOCKIUS LLP |
| ROBERT J. GAYBRICK |
| 1800 M STREET, N.W. |
| WASHINGTON, D.C. 20036 |
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