Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/05/1999
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Application #:
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08999229
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Filing Dt:
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12/29/1997
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Inventors:
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YEUR-LUEN TU, SHIANG-PENG CHENG, KWONG-JR TSAI, LIANG-GI YAO
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Title:
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A PLASMA TREATMENT METHOD FOR PECVD SILICON NITRIDE FILMS FOR IMPROVED PASSIVATION LAYERS ON SEMICONDUCTOR METAL INTERCONNECTIONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| 123, PARK AVE-3RD |
| HSIN-CHU, TAIWAN R.O.C |
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| GEORGE O. SAILE |
| 20 MCINTOSH DRIVE |
| POUGHKEEPSIE, NY 12603 |
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