Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/09/1999
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Application #:
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08965281
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Filing Dt:
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11/06/1997
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Inventors:
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MICHIHIKO YANAGISAWA, SHINYA IIDA
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Title:
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PLASMA ETCHING METHOD AND APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 30-3, NISHIROKUGOU 4-CHOME |
| OHTA-KU, TOKYO, JAPAN |
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| SNELL & WILMER L.L.P. |
| ATTN: MICHAEL K. KELLY |
| ONE ARIZONA CENTER |
| 400 EAST VAN BUREN |
| PHOENIX, AZ 85004-0001 |
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