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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
5981118
Issue Dt:
11/09/1999
Application #:
09042747
Filing Dt:
03/17/1998
Inventors:
NOBUYUKI YASUTAKE, YOSHIHISA OOAE, KAZUSHI ISHIDA, HIROSHI YASUDA, AKIYOSHI TSUDA et al
Title:
METHOD FOR CHARGED PARTICLE BEAM EXPOSURE WITH FIXED BARYCENTER THROUGH BALANCING STAGE SCAN
Assignment: 1
Reel/Frame:
009045/0928Recorded: 03/17/1998Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
YASUTAKE, NOBUYUKI
Exec Dt:
02/19/1998
OOAE, YOSHIHISA
Exec Dt:
02/19/1998
ISHIDA, KAZUSHI
Exec Dt:
02/19/1998
YASUDA, HIROSHI
Exec Dt:
02/19/1998
TSUDA, AKIYOSHI
Exec Dt:
02/19/1998
TANAKA, HITOSHI
Exec Dt:
02/19/1998
Assignees:
FUJITSU LIMITED
1-1, KAMIKODANAKA, 4-CHOME NAKAHARA-KU
KAWASAKI-SHI, KANAGAWA, 211-8588, JAPAN
ADVANTEST CORPORATION
1-32-1, ASAHI-CHO, NERIMA-KU
TOKYO 179-0071, JAPAN
Correspondent:
STAAS & HALSEY
JAMES D. HALSEY, JR.
700 ELEVENTH STREET, N.W.
SUITE 500
WASHINGTON, D.C. 20001

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